Busch Introduces New COBRA Dry Screw Vacuum Pumps For The Semiconductor Industry

Busch USA now manufactures and sales a new product line of vacuum pumps especially suited for the semiconductor industry.


Virginia Beach, Virginia -- Busch, a world-leading manufacturer of vacuum pumps and vacuum systems, has launched a new range of dry screw vacuum pumps for the semiconductor industry. The COBRA DS series is designed to maximize production uptime and provide a high return on investment (ROI).

All COBRA DS pumps are of a single stage design, requiring fewer moving parts compared to multi-stage dry pumps. With fewer moving parts, not only are service intervals extended, but nitrogen consumption is also greatly reduced.

With our advanced on-board controls and diagnostics, the pump can be directly interfaced to the process tool. The compact universal interface unit also allows for the monitoring of operating parameters including water flow, nitrogen flow, motor speed and motor current. Idle mode capability ensures that pump speed is automatically controlled to match system load, further reducing power, water and nitrogen costs.

All COBRA DS pumps are designed with an indirect cooling system to provide uniform temperatures throughout the pump, eliminating cold spots to provide a thermally stable water jacket. Each comes housed in a vented, standard enclosure that ensures low noise levels, a compact, small footprint, and simple connectivity.

Headquartered in Virginia Beach, VA, Busch USA provides a full range of vacuum solutions for industrial, laboratory, process and fine vacuum applications. For additional information on our COBRA DS series vacuum pumps, visit us at www.buschusa.com/products/product-portfolio/cobra-semicon/info/, or call us at 1-800-USA-PUMP.

Company Contact Information
Busch LLC
Marketing
516 Viking Drive
23452
1-800-USA-PUMP

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